Fabrication of mems devices – a scanning micro mirror case study
Fabricación de sistemas MEMS – un caso de estudio en la fabricación de un micro-espejo
Autor
Zarzycki, Artur
Gambin, Wiktor L.
Bargiel, Sylwester
Gorecki, Christophe
Metadatos
Mostrar el registro completo del ítemColecciones
- tecnologia [520]
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